مؤتمر
A new cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating
| العنوان: | A new cell technology for the scalable BST capacitor using damascene-formed pedestal electrode with a [Pt-Ir] alloy coating |
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| المؤلفون: | Itoh, H., Tsunemine, Y., Yutani, A., Okudaira, T., Kashihara, K., Inuishi, M., Yamamuka, M., Kawahara, T., Horikawa, T., Ohmori, T., Satoh, S. |
| المصدر: | 2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104) VLSI technology VLSI Technology, 2000. Digest of Technical Papers. 2000 Symposium on. :106-107 2000 |
| Relation: | 2000 Symposium on VLSI Technology. Digest of Technical Papers |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780363051 9780780363052 |
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| DOI: | 10.1109/VLSIT.2000.852788 |