مؤتمر
Ar RIE to improve the source/drain contact in GaN HEMT
| العنوان: | Ar RIE to improve the source/drain contact in GaN HEMT |
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| المؤلفون: | Zhu, K.M., Deng, J.N., Cao, X.Y., Wan, J. |
| المصدر: | 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) Solid-State and Integrated Circuit Technology (ICSICT), 2018 14th IEEE International Conference on. :1-3 Oct, 2018 |
| Relation: | 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538644409 9781538644393 9781538644416 |
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| DOI: | 10.1109/ICSICT.2018.8565005 |