Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers

التفاصيل البيبلوغرافية
العنوان: Mechanical Solution for Out-of-Plane Sensitivity Enhancement of CMOS MEMS Convective Accelerometers
المؤلفون: Abdellatif, S., Mezghani, B., Tounisi, F., Mailly, F., Nouet, P.
المصدر: 2018 25th IEEE International Conference on Electronics, Circuits and Systems (ICECS) Electronics, Circuits and Systems (ICECS), 2018 25th IEEE International Conference on. :301-304 Dec, 2018
Relation: 2018 25th IEEE International Conference on Electronics, Circuits and Systems (ICECS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538695623
DOI:10.1109/ICECS.2018.8617928