Electroplating of Through Silicon Vias: A Kinetic Monte Carlo Model

التفاصيل البيبلوغرافية
العنوان: Electroplating of Through Silicon Vias: A Kinetic Monte Carlo Model
المؤلفون: MingRui, Lai, Hariharaputran, Ramanarayan, Khoo, Khoong Hong, Hongmei, Jin, Wu, Shunnian, Joshi, Chaitanya Amol, Mangipudi, Kodanda Ram, Quek, Siu Sin, Wu, David T., Narayanaswamy, Sridhar, Srinivasan, Bharathi Madurai
المصدر: 2019 Electron Devices Technology and Manufacturing Conference (EDTM) Electron Devices Technology and Manufacturing Conference (EDTM), 2019. :342-344 Mar, 2019
Relation: 2019 Electron Devices Technology and Manufacturing Conference (EDTM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538665084
DOI:10.1109/EDTM.2019.8731250