مؤتمر
Channeled MeV B, P and As Profiles in Si(100): Monte-Carlo Models and SIMS
| العنوان: | Channeled MeV B, P and As Profiles in Si(100): Monte-Carlo Models and SIMS |
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| المؤلفون: | Current, Michael, Kawasaki, Yoji, Hobler, Gerhard, Sugitani, Michiro |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :251-254 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538668283 9781538668290 9781538668276 |
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| DOI: | 10.1109/IIT.2018.8807901 |