مؤتمر
Thickness Variance of Silicon Oxide with Nitrogen Ion Implant
| العنوان: | Thickness Variance of Silicon Oxide with Nitrogen Ion Implant |
|---|---|
| المؤلفون: | Ishibashi, Kazuhisa, Kawasaki, Yoji, Ninomiya, Shiro, Sugitani, Michiro |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :140-143 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781538668283 9781538668290 9781538668276 |
|---|---|
| DOI: | 10.1109/IIT.2018.8807940 |