PULSION®-Solar, a Efficient and Cost Effective Plasma Immersion Ion Implantation Solution for Phosphorus and Boron Doping needed for high Conversion Efficiency Silicon Solar Cells

التفاصيل البيبلوغرافية
العنوان: PULSION®-Solar, a Efficient and Cost Effective Plasma Immersion Ion Implantation Solution for Phosphorus and Boron Doping needed for high Conversion Efficiency Silicon Solar Cells
المؤلفون: Torregrosa, Frank, Roux, Laurent, Lanterne, Adeline, Desrues, Thibaut, Dubois, Sebastien, Milesi, Frederic, Coig, Marianne, Sempere, Guillaume
المصدر: 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :180-183 Sep, 2018
Relation: 2018 22nd International Conference on Ion Implantation Technology (IIT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781538668283
9781538668290
9781538668276
DOI:10.1109/IIT.2018.8807976