مؤتمر
Advantages and Challenges of Plasma Immersion Ion Implantation for Power Devices Manufacturing on Si, SiC and GaN using PULSION® Tool
| العنوان: | Advantages and Challenges of Plasma Immersion Ion Implantation for Power Devices Manufacturing on Si, SiC and GaN using PULSION® Tool |
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| المؤلفون: | Torregrosa, Frank, Spiegel, Yohann, Roux, Laurent, Sempere, Guillaume, Borvon, Gael, Wuebben, Thomas, Schustereder, Werner, Jelinek, Moriz, Morancho, Frederic, Godignon, Philippe, Zielinski, Marcin |
| المصدر: | 2018 22nd International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2018 22nd International Conference on. :33-37 Sep, 2018 |
| Relation: | 2018 22nd International Conference on Ion Implantation Technology (IIT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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