Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators

التفاصيل البيبلوغرافية
العنوان: Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators
المؤلفون: Jia, Hao, Matheny, Matthew H., Roukes, Michael L., Feng, Philip X.-L.
المصدر: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019 20th International Conference on. :442-445 Jun, 2019
Relation: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
قاعدة البيانات: IEEE Xplore Digital Library