مؤتمر
Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass
| العنوان: | Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass |
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| المؤلفون: | Uejima, S., Oka, C., Hata, S., Sakurai, J. |
| المصدر: | 2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS) Micro-NanoMechatronics and Human Science (MHS), 2018 International Symposium on. :1-5 Dec, 2018 |
| Relation: | 2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781538667927 9781538667934 |
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| تدمد: | 24743771 |
| DOI: | 10.1109/MHS.2018.8887020 |