مؤتمر
Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films
| العنوان: | Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films |
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| المؤلفون: | Li, Meng-Jie, Zhou, Zai-Fa, Yi, Li-Yan, Wang, Xi-Jie, Adnan, Saeed |
| المصدر: | 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO) Nanotechnology (IEEE-NANO), 2019 IEEE 19th International Conference on. :106-109 Jul, 2019 |
| Relation: | 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781728128924 9781728128917 |
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| تدمد: | 19449380 |
| DOI: | 10.1109/NANO46743.2019.8993916 |