دورية أكاديمية
Design and Optimization of Triple-k Spacer Structure in Two-Stack Nanosheet FET From OFF-State Leakage Perspective
العنوان: | Design and Optimization of Triple-k Spacer Structure in Two-Stack Nanosheet FET From OFF-State Leakage Perspective |
---|---|
المؤلفون: | Ryu, D., Kim, M., Kim, S., Choi, Y., Yu, J., Lee, J., Park, B. |
المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 67(3):1317-1322 Mar, 2020 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189383 15579646 |
---|---|
DOI: | 10.1109/TED.2020.2969445 |