مؤتمر
A defect-to-yield correlation study for marginally printing reticle defects in the manufacture of a 16Mb flash memory device
| العنوان: | A defect-to-yield correlation study for marginally printing reticle defects in the manufacture of a 16Mb flash memory device |
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| المؤلفون: | Erhardt, J., Phan, K., Backe, E., Tran, Q., Fletcher, B., Hopper, C.B., Peterson, I., Zuo, A. |
| المصدر: | 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 2000 (Cat. No.00CH37072) Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 2000 IEEE/SEMI. :96-102 2000 |
| Relation: | 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780359216 9780780359215 |
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| تدمد: | 10788743 |
| DOI: | 10.1109/ASMC.2000.902566 |