Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance

التفاصيل البيبلوغرافية
العنوان: Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance
المؤلفون: Molina, J., Mimura, T., Nakamura, Y., Shimizu, T., Funakubo, H., Fujiwara, I., Hoshii, T., Ohmi, S., Hori, A., Wakabayashi, H., Tsutsui, K., Kakushima, K.
المصدر: 2020 IEEE International Memory Workshop (IMW) Memory Workshop (IMW), 2020 IEEE International. :1-4 May, 2020
Relation: 2020 IEEE International Memory Workshop (IMW)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728163062
تدمد:25737503
DOI:10.1109/IMW48823.2020.9108148