التفاصيل البيبلوغرافية
| العنوان: |
New High Efficiency Heater Design for a 3-axis CMOS MEMS Convective Accelerometer |
| المؤلفون: |
Abdellatif, Sonia, Mezghani, Brahim, Mailly, Frederick, Nouet, Pascal |
| المصدر: |
2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2020 Symposium on. :1-6 Jun, 2020 |
| Relation: |
2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
