دورية أكاديمية
Impacts of Ammonia Gas Plasma Surface Treatment on Polycrystalline-Silicon Junctionless Thin-Film Transistor
العنوان: | Impacts of Ammonia Gas Plasma Surface Treatment on Polycrystalline-Silicon Junctionless Thin-Film Transistor |
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المؤلفون: | Ma, W.C., Luo, S., Tsai, C., Lin, J., Li, M., Jhu, J., Chang, T., Chen, P., Chang, Y. |
المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 49(1):26-32 Jan, 2021 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00933813 19399375 |
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DOI: | 10.1109/TPS.2020.3010483 |