Effect of annealing on the toughness of 40-μm-wide nanotwinned Cu lines

التفاصيل البيبلوغرافية
العنوان: Effect of annealing on the toughness of 40-μm-wide nanotwinned Cu lines
المؤلفون: Hsu, Wei-You, Li, Yu-Jin, Tseng, I-Hsin, Lin, Benson Tzu-Hung, Chang, Chia-Cheng, Chen, Chih
المصدر: 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) Electronic Components and Technology Conference (ECTC), 2020 IEEE 70th. :906-911 Jun, 2020
Relation: 2020 IEEE 70th Electronic Components and Technology Conference (ECTC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728161808
تدمد:23775726
DOI:10.1109/ECTC32862.2020.00148