دورية أكاديمية
Comparison of Abatement Models for CF4 Reacting With Nitrogen Thermal Plasma
| العنوان: | Comparison of Abatement Models for CF4 Reacting With Nitrogen Thermal Plasma |
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| المؤلفون: | Chau, S., Chien, S., Chen, S. |
| المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 49(1):120-146 Jan, 2021 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00933813 19399375 |
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| DOI: | 10.1109/TPS.2020.3028583 |