دورية أكاديمية
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems
العنوان: | On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems |
---|---|
المؤلفون: | Dahl-Hansen, R.P., Tyholdt, F., Gjessing, J., Vogl, A., Wittendorp, P., Vedum, J., Tybell, T. |
المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 30(1):105-115 Feb, 2021 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10577157 19410158 |
---|---|
DOI: | 10.1109/JMEMS.2020.3031201 |