دورية أكاديمية
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems
| العنوان: | On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems |
|---|---|
| المؤلفون: | Dahl-Hansen, R.P., Tyholdt, F., Gjessing, J., Vogl, A., Wittendorp, P., Vedum, J., Tybell, T. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 30(1):105-115 Feb, 2021 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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