مؤتمر
Optimal Control for Stabilizing Fringe Phase in Interference Lithography
| العنوان: | Optimal Control for Stabilizing Fringe Phase in Interference Lithography |
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| المؤلفون: | Lu, Sen, Yang, Kaiming, Zhu, Yu, Wang, Leijie, Zhang, Ming |
| المصدر: | 2020 IEEE 5th Optoelectronics Global Conference (OGC) Optoelectronics Global Conference (OGC), 2020 IEEE 5th. :173-176 Sep, 2020 |
| Relation: | 2020 IEEE 5th Optoelectronics Global Conference (OGC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781728198606 9781728198590 |
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| DOI: | 10.1109/OGC50007.2020.9260471 |