مؤتمر
Molecular Dynamics Study on Sub-Nanoscale Removal Mechanism of 3C-SIC in a Fixed Abrasive Polishing
| العنوان: | Molecular Dynamics Study on Sub-Nanoscale Removal Mechanism of 3C-SIC in a Fixed Abrasive Polishing |
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| المؤلفون: | Zhou, Piao, Zhu, Yongwei, Sun, Tao |
| المصدر: | 2020 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2020 China. :1-4 Jun, 2020 |
| Relation: | 2020 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781728165585 |
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| DOI: | 10.1109/CSTIC49141.2020.9282578 |