مؤتمر
A noble metallization process using Preferential Metal Deposition (PMD)-aluminum with methylpyrroridine alane (MPA)
| العنوان: | A noble metallization process using Preferential Metal Deposition (PMD)-aluminum with methylpyrroridine alane (MPA) |
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| المؤلفون: | Jong Myeong Lee, Byung Hee Kim, Ju Young Yun, Myoung Bum Lee, Gil Heyun Choi, Young Wook Park, Hyun Koock Shin, Sang In Lee, Joo Tae Moon |
| المصدر: | Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461) Interconnect technology conference Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International. :72-74 2001 |
| Relation: | Proceedings of the IEEE 2001 International Interconnect Technology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780366786 9780780366787 |
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| DOI: | 10.1109/IITC.2001.930021 |