دورية أكاديمية
TCAD-Based Flexible Fin Pitch Design for 3-nm Node 6T-SRAM Using Practical Source/Drain Patterning Scheme
| العنوان: | TCAD-Based Flexible Fin Pitch Design for 3-nm Node 6T-SRAM Using Practical Source/Drain Patterning Scheme |
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| المؤلفون: | Lee, J., Yoon, J., Lee, S., Jeong, J., Baek, R. |
| المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 68(3):1031-1036 Mar, 2021 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00189383 15579646 |
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| DOI: | 10.1109/TED.2021.3053508 |