التفاصيل البيبلوغرافية
| العنوان: |
Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps |
| المؤلفون: |
Lesniewska, A., Pedreira, O. Varela, Lofrano, M., Murdoch, G., van der Veen, M., Dangol, A., Horiguchi, N., Tokei, Zs., Croes, K. |
| المصدر: |
2021 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2021 IEEE International. :1-6 Mar, 2021 |
| Relation: |
2021 IEEE International Reliability Physics Symposium (IRPS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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