مؤتمر
Plasma damage in floating metal-insulator-metal capacitors
| العنوان: | Plasma damage in floating metal-insulator-metal capacitors |
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| المؤلفون: | Ackaert, J., Zhichun Wang, De Backer, E., Coppens, P. |
| المصدر: | Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) Physical and failure analysis of integrated circuits Physical and Failure Analysis of Integrated Circuits, 2001. IPFA 2001. Proceedings of the 2001 8th International Symposium on the. :224-227 2001 |
| Relation: | Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780366751 9780780366756 |
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| DOI: | 10.1109/IPFA.2001.941491 |