Investigation of Wet Pretreatment to Improve Cu-Cu Bonding for Hybrid Bonding Applications

التفاصيل البيبلوغرافية
العنوان: Investigation of Wet Pretreatment to Improve Cu-Cu Bonding for Hybrid Bonding Applications
المؤلفون: Hung, Tzu-Heng, Kang, Ting-Cih, Mao, Shan-Yu, Chou, Tzu-Chieh, Hu, Han-Wen, Chiu, Hsih-Yang, Shih, Chiang-Lin, Chen, Kuan-Neng
المصدر: 2021 IEEE 71st Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2021 IEEE 71st. :700-705 Jun, 2021
Relation: 2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
قاعدة البيانات: IEEE Xplore Digital Library