التفاصيل البيبلوغرافية
| العنوان: |
Low Resistivity Titanium Nitride Thin Film Fabricated by Atomic Layer Deposition on Silicon |
| المؤلفون: |
Kuo, Cheng-hsuan, Wang, Victor, Zhang, Zichen, Spiegelman, Jeffrey, Alvarez, Daniel, Kummel, Andrew C., Yun, SeongUK, Simka, Harsono |
| المصدر: |
2021 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2021 IEEE International. :1-3 Jul, 2021 |
| Relation: |
2021 IEEE International Interconnect Technology Conference (IITC) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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