Non-Equilibrium Materials Processing using GHZ Split-Ring Resonator Microplasma Resonators

التفاصيل البيبلوغرافية
العنوان: Non-Equilibrium Materials Processing using GHZ Split-Ring Resonator Microplasma Resonators
المؤلفون: Cohick, Zane, Hoff, Brad, Telmer, Maxwell, Reeja-Jayan, B., Lanagan, Michael T.
المصدر: 2020 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2020 IEEE International Conference on. :145-145 Dec, 2020
Relation: 2020 IEEE International Conference on Plasma Science (ICOPS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781728153070
تدمد:25767208
DOI:10.1109/ICOPS37625.2020.9717583