دورية أكاديمية
DC Performance Variations by Grain Boundary in Source/Drain Epitaxy of Sub-3-nm Nanosheet Field-Effect Transistors
| العنوان: | DC Performance Variations by Grain Boundary in Source/Drain Epitaxy of Sub-3-nm Nanosheet Field-Effect Transistors |
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| المؤلفون: | Yoon, J., Jeong, J., Lee, S., Lee, J., Lim, J., Baek, R. |
| المصدر: | IEEE Access Access, IEEE. 10:22032-22037 2022 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 21693536 |
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| DOI: | 10.1109/ACCESS.2022.3154049 |