دورية أكاديمية
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment
| العنوان: | Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment |
|---|---|
| المؤلفون: | Kim, S.H., Kim, C.Y., Seol, D.H., Choi, J.E., Hong, S.J. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 35(2):174-185 May, 2022 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
|---|---|
| DOI: | 10.1109/TSM.2022.3161512 |