دورية أكاديمية
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging
| العنوان: | Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging |
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| المؤلفون: | Frascaroli, J., Tonini, M., Colombo, S., Livellara, L., Mariani, L., Targa, P., Fumagalli, R., Samu, V., Nagy, M., Molnar, G., Horvath, A., Bartal, Z., Kiss, Z., Sipocz, T., Mica, I. |
| المصدر: | IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 35(3):540-545 Aug, 2022 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08946507 15582345 |
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| DOI: | 10.1109/TSM.2022.3189847 |