مؤتمر
A highly dense MEMS optical switch array integrated with planar lightwave circuit
| العنوان: | A highly dense MEMS optical switch array integrated with planar lightwave circuit |
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| المؤلفون: | Kanie, T., Katayama, M., Shiozaki, M., Komiya, T., Saitoh, K., Nishimura, M. |
| المصدر: | Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) Microelectromechanical systems - MEMS 2002 Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on. :560-563 2002 |
| Relation: | Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780371852 9780780371859 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2002.984333 |