Automatic 4 K Cryogenic Probe Station for DC and Microwave Measurements on 150-mm and 200-mm Wafers

التفاصيل البيبلوغرافية
العنوان:	Automatic 4 K Cryogenic Probe Station for DC and Microwave Measurements on 150-mm and 200-mm Wafers
المؤلفون:	West, Joshua T., Kurlej, Arthur, Wynn, Alex, Rogers, Chad, Gouker, Mark A., Tolpygo, Sergey K.
المصدر:	2022 IEEE/MTT-S International Microwave Symposium - IMS 2022 International Microwave Symposium - IMS 2022, 2022 IEEE/MTT-S. :237-240 Jun, 2022
Relation:	2022 IEEE/MTT-S International Microwave Symposium - IMS 2022
قاعدة البيانات:	IEEE Xplore Digital Library