مؤتمر
Effect of impurity doping on 4H-SiC planarization
| العنوان: | Effect of impurity doping on 4H-SiC planarization |
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| المؤلفون: | Huang, Yuhua, Zhou, Yuqi, Li, Jinming, Zhu, Fulong |
| المصدر: | 2022 23rd International Conference on Electronic Packaging Technology (ICEPT) Electronic Packaging Technology (ICEPT), 2022 23rd International Conference on. :1-5 Aug, 2022 |
| Relation: | 2022 23rd International Conference on Electronic Packaging Technology (ICEPT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781665499057 |
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| DOI: | 10.1109/ICEPT56209.2022.9873291 |