مؤتمر
Carbon Plug Application in 3D NAND Fabrication
| العنوان: | Carbon Plug Application in 3D NAND Fabrication |
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| المؤلفون: | Chang, Yu-Chih, Chen, Liang-Yu, Chen, Kuang-Wei, Luoh, Tuung, Yang, Ling-Wuu, Yang, Ta-Hone, Chen, Kuang-Chao |
| المصدر: | 2022 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2022 IEEE International. :16-18 Jun, 2022 |
| Relation: | 2022 IEEE International Interconnect Technology Conference (IITC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781665486460 |
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| تدمد: | 23806338 |
| DOI: | 10.1109/IITC52079.2022.9881319 |