دورية أكاديمية
Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films
العنوان: | Xenon implantation effects on the structural and optical properties of reactively sputtered titanium nitride thin films |
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المؤلفون: | Popović, M., Novaković, M., Mitrić, M., Zhang, K., Rakočević, Z., Bibić, N. |
المصدر: | In Materials Research Bulletin July 2017 91:36-41 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00255408 |
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DOI: | 10.1016/j.materresbull.2017.03.031 |