دورية أكاديمية

Low-oxygen silicon preparation using vacuum treatment by oxidation control and moisture removal kinetics investigation

التفاصيل البيبلوغرافية
العنوان: Low-oxygen silicon preparation using vacuum treatment by oxidation control and moisture removal kinetics investigation
المؤلفون: Han, Shifeng, Yang, Shicong, Wei, Kuixian, Ma, Wenhui, Zhang, Jianqiang
المصدر: In Vacuum September 2024 227
قاعدة البيانات: ScienceDirect
الوصف
تدمد:0042207X
DOI:10.1016/j.vacuum.2024.113410