دورية أكاديمية
Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications
| العنوان: | Fabrication and characterization of buried silicide layers on SOI substrates for BICMOS-applications |
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| المؤلفون: | Zimmermann, S., Zhao, Q.T., Trui, B., Wiemer, M., Kaufmann, C., Mantl, S., Dudek, V., Gessner, T. |
| المصدر: | In Microelectronic Engineering 2005 82(3):454-459 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2005.07.042 |