دورية أكاديمية
Fabrication of suspended microchannel resonators with integrated piezoelectric transduction
| العنوان: | Fabrication of suspended microchannel resonators with integrated piezoelectric transduction |
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| المؤلفون: | De Pastina, A., Maillard, D., Villanueva, L.G. |
| المصدر: | In Microelectronic Engineering 15 May 2018 192:83-87 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2018.02.011 |