دورية أكاديمية
Digital image correlation of SEM images for surface deformation of CMOS IC
| العنوان: | Digital image correlation of SEM images for surface deformation of CMOS IC |
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| المؤلفون: | Chen, Terry Yuan-Fang, Chen, Tzu-Ching, Cheng, Fa-Yen, Tsai, Ang-Ting, Lin, Ming-Tzer |
| المصدر: | In Microelectronic Engineering 5 December 2018 201:16-21 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2018.09.007 |