دورية أكاديمية
Hybridization of ellipsometry and XPS energy loss: Robust band gap and broadband optical constants determination of SiGe, HfON and MoOx thin films
| العنوان: | Hybridization of ellipsometry and XPS energy loss: Robust band gap and broadband optical constants determination of SiGe, HfON and MoOx thin films |
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| المؤلفون: | Levert, Théo, Zakhtser, Alter, Duval, Julien, Raguenez, Chloé, Verdier, Stéphane, Le Cunff, Delphine, Tortai, Jean-Hervé, Pelissier, Bernard |
| المصدر: | In Microelectronic Engineering 1 January 2024 283 |
| قاعدة البيانات: | ScienceDirect |
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