دورية أكاديمية
Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications
العنوان: | Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications |
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المؤلفون: | Chaluvadi, Sandeep Kumar, Wang, Zhe, Carvalho de Araújo, Laryssa M., Orgiani, Pasquale, Polewczyk, Vincent, Vinai, Giovanni, Rousseau, Olivier, Pierron, Victor, Pautrat, Alain, Domengès, Bernadette, Schlom, Darrell G., Méchin, Laurence |
المصدر: | In Applied Surface Science 30 March 2022 579 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 01694332 |
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DOI: | 10.1016/j.apsusc.2021.152095 |