دورية أكاديمية
Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigations
العنوان: | Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigations |
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المؤلفون: | Li, Zhuolun, Jin, Liangmao, Cao, Zhiqiang, Zhang, Chong, Cao, Xin, Han, Gaorong, Peng, Shou, Liu, Yong |
المصدر: | In Applied Surface Science 30 November 2023 638 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 01694332 |
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DOI: | 10.1016/j.apsusc.2023.158055 |