دورية أكاديمية

Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigations

التفاصيل البيبلوغرافية
العنوان: Development and characterization of a novel RE3+ doped Core-shell CeO2 abrasive system and its glass CMP investigations
المؤلفون: Li, Zhuolun, Jin, Liangmao, Cao, Zhiqiang, Zhang, Chong, Cao, Xin, Han, Gaorong, Peng, Shou, Liu, Yong
المصدر: In Applied Surface Science 30 November 2023 638
قاعدة البيانات: ScienceDirect
الوصف
تدمد:01694332
DOI:10.1016/j.apsusc.2023.158055