دورية أكاديمية
Facile routes to enhance doping efficiency using nanocomposite structures for high-mobility and stable PEALD-ITGO TFTs
| العنوان: | Facile routes to enhance doping efficiency using nanocomposite structures for high-mobility and stable PEALD-ITGO TFTs |
|---|---|
| المؤلفون: | Kim, Dong-Gyu, Kim, Minseok, Lee, Dong-Hyeon, Lee, Seunghee, Kho, Jihyun, Kim, Yurim, Kuh, Bongjin, Yanagi, Hiroshi, Fukui, Keiga, Park, Jin-Seong |
| المصدر: | In Applied Surface Science 30 August 2024 665 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
|---|---|
| DOI: | 10.1016/j.apsusc.2024.160370 |