دورية أكاديمية
Sputter yield measurements to evaluate the target state during reactive magnetron sputtering
| العنوان: | Sputter yield measurements to evaluate the target state during reactive magnetron sputtering |
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| المؤلفون: | Schelfhout, R., Strijckmans, K., Depla, D. |
| المصدر: | In Surface & Coatings Technology 15 October 2020 399 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02578972 |
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| DOI: | 10.1016/j.surfcoat.2020.126097 |