دورية أكاديمية
Effect of YF3 on fluorocarbon plasma resistance of Y2O3–Al2O3–B2O3 glasses
| العنوان: | Effect of YF3 on fluorocarbon plasma resistance of Y2O3–Al2O3–B2O3 glasses |
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| المؤلفون: | Kim, Yeonju, Kim, Jisu, Kim, Ungsoo, Kim, Kangduk |
| المصدر: | In Ceramics International 15 September 2024 50(18) Part A:32225-32232 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02728842 |
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| DOI: | 10.1016/j.ceramint.2024.06.030 |