دورية أكاديمية
A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process
| العنوان: | A numerical study on airflow and dynamic cross-contamination in the super cleanroom for photolithography process |
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| المؤلفون: | Noh, Kwang-Chul, Oh, Myung-Do *, Lee, Seung-Chul |
| المصدر: | In Building and Environment 2005 40(11):1431-1440 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 03601323 |
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| DOI: | 10.1016/j.buildenv.2004.11.016 |