دورية أكاديمية
Traveling wave distortion of MEMS ultrasonic motor induced by anisotropic elasticity
العنوان: | Traveling wave distortion of MEMS ultrasonic motor induced by anisotropic elasticity |
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المؤلفون: | He, Jiangbo, Chen, Yu, Cao, Binlei, Li, Xiaoshi, Yang, Tianyu, Hu, Zongda, Ran, Longqi, Zhou, Wu |
المصدر: | In Mechanical Systems and Signal Processing 15 April 2023 189 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 08883270 |
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DOI: | 10.1016/j.ymssp.2022.110083 |