Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing

التفاصيل البيبلوغرافية
العنوان:	Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing
المؤلفون:	Liu, Nian, Sugimoto, Kentaro, Yoshitaka, Naoya, Yamada, Hideaki, Sun, Rongyan, Kawai, Kentaro, Arima, Kenta, Yamamura, Kazuya
المصدر:	In Diamond & Related Materials April 2022 124
قاعدة البيانات:	ScienceDirect

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